Board of Directors

Jon D. Tompkins Chairman of the Board. Director since 1998 Retired as Chief Executive Officer of KLA-Tencor Corporation, a manufacturer of semiconductor equipment, in 1998 and retired as Chairman of the Board of Directors of KLA-Tencor in June 1999. Mr. Tompkins is a member of the Board of Directors of Cymer, Inc.

Nicholas Konidaris Director since 2004 Was appointed President and Chief Executive Officer of ESI in January 2004. From July 1999 to January 2004, Mr. Konidaris served as President and Chief Executive Officer of Advantest America Corp., a holding company for Advantest America, Inc., an automatic test equipment supplier. From July 1997 to July 1999, Mr. Konidaris served as the Chief Executive Officer of Advantest America Corp. Additionally, from July 1997 to January 2004, Mr. Konidaris served as Chairman of the Board, President and Chief Executive Officer of Advantest America, Inc. Mr. Konidaris is also a director of Ultratech, Inc.

Richard J. Faubert Director since 2003 Was appointed President and Chief Executive Officer of AmberWave Systems, Inc., a semiconductor technology company, in September 2003. He served as President, Chief Executive Officer and director of SpeedFam-IPEC, Inc., a manufacturer of semiconductor equipment, from 1998 through 2002. Upon the sale of SpeedFam-IPEC to Novellus Systems, Inc., a capital equipment manufacturer, he served as Executive Vice President of Novellus until April 2003. Prior to his employment with SpeedFam-IPEC, Inc., he held executive and management positions at Tektronix, Inc., a test, measurement, and monitoring company, and GenRad, Inc., an electronics testing and manufacturing company. Mr. Faubert is also on the Board of Directors of Radisys Corp. and is on the North American Advisory Board of Semiconductor Equipment and Materials, Inc.

Frederick A. Ball Director since 2003 Is the Chief Financial Officer of Webroot Software, a leading provider of software security solutions for consumers, enterprises and small and medium businesses worldwide. Prior to Webroot, Mr. Ball was the Chief Financial Officer at BigBand Networks (BBND) and Borland Software (BORL). Prior to his employment with Borland, Mr. Ball served as Vice President, Mergers and Acquisitions for KLA-Tencor Corporation and prior to that as its Vice President of Finance. Mr. Ball was with PriceWaterhousCoopers for over 10 years. Mr. Ball is a director at Advanced Energy Industries (AEIS).

Robert R. Walker Director since 2003 Is retired from Agilent Technologies, Inc., an electronic instrument company, where he served as Executive Vice President and Chief Financial Officer from May 2000 until December 2001. From May 1999 until May 2000, he was Senior Vice President and Chief Financial Officer. During 1997 and 1998, Mr. Walker served as Vice President and General Manager of Hewlett-Packard's Professional Services Business Unit. From 1993 to 1997, he led Hewlett-Packard's information systems function, serving as Vice President and Chief Information Officer from 1995 to 1997.

Barry L. Harmon Director since 2002 Served as President and Chief Executive Officer of ESI from April 2003 until January 2004. From July 2000 until September 2001, Mr. Harmon served as Senior Vice President – West Coast Operations for Avocent Corporation, a provider of KVM switching and solutions. Avocent is the company resulting from the merger of Apex, Inc. with Cybex Computer Products in 2000. Mr. Harmon served as Chief Financial Officer of Apex, Inc., also a provider of KVM switching and solutions, from 1999 until its merger with Cybex. From 1992 to 1999, he was Senior Vice President and Chief Financial Officer of ESI.

Gerald F. Taylor Director since 1998 Retired in 1998 as Senior Vice President and Chief Financial Officer of Applied Materials, Inc., a manufacturer of semiconductor equipment. He was employed by Applied Materials since 1984.

W. Arthur Porter Director since 1980 Served as University Vice President for Technology Development at the University of Oklahoma from July 1998 until July 2007. Until June 2005, he also served as the Dean of the College of Engineering and is currently Professor emeritus of electrical and computer engineering and Chairman of Southwest Nanotechnologies Inc. He was formerly President of the Houston Advanced Research Center. Dr. Porter is also a director of Stewart Information Services Corporation and Bookham, Inc.

Edward C. Grady Director since 2008 Was President and Chief Executive officer of Brooks Automation until Sept 30 2007. Brooks Automation offers hardware products, services and tightly integrated solutions that optimize manufacturing equipment, factory operations and productivity for the semiconductor and other complex manufacturing industries, including clean tech and data storage. Prior to joining Brooks in 2003, he successfully ran the wafer inspection group and the metrology groups each with multiple divisions at KLA-Tencor. Prior to KLATencor, he was CEO of Micromask a supplier of photomasks and services to the semiconductor industry. He started his career as an engineer for Monsanto / MEMC and eventually rose to the position of vice president of worldwide sales. Mr. Grady is also a director at Advanced Energy Inc., Verigy Ltd., and Evergreen Solar Inc. He serves on the compensation committees for each of these companies, chair of the compensation committee for Verigy Ltd. and serves as lead director for Evergreen Solar. He also guest lectures at Boston College Carroll School in management, business development and leadership.